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Removal of Ion Implanted Resists with Various Acceleration Energy using Wet Ozone
Goto, Yousuke, Maruoka, Takeshi, Yamamoto, Masashi, Horibe, Hideo, Kusano, Eiji, Miura, Toshinori, Kekura, Mituru, Tagawa, SeiichiVolume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.321
File:
PDF, 410 KB
english, 2009