Pattern Size Effects on Demolding Force for Imprint Process
Fujikawa, Norihiro, Kawata, Hiroaki, Yasuda, Masaaki, Hirai, YoshihikoVolume:
25
Year:
2012
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.25.245
File:
PDF, 254 KB
english, 2012