A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography
Warisawa, Shin^|^rsquo, ichi, Kuroda, Kohei, Chen, Si, Kometani, Reo, Ishihara, SunaoVolume:
25
Year:
2012
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.25.37
File:
PDF, 1.05 MB
english, 2012