UV-Nanoimprint Lithography with Film Mold for LED-PSS...

UV-Nanoimprint Lithography with Film Mold for LED-PSS Fabrication Process

Kojima, Ryoota, Takahashi, Takanori, Mizawa, Takahide
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Volume:
26
Year:
2013
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.26.105
File:
PDF, 192 KB
english, 2013
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