Evaluation of Template Release Energy with Use of...

Evaluation of Template Release Energy with Use of Fluorinated Segregation Agents for UV Nanoimprint Resists

Nakamura, Naoto, Yamashita, Tsuneo, Kitagawa, Takuya, Kawata, Hiroaki, Shirai, Masamitsu, Hirai, Yoshihiko
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Volume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.111
File:
PDF, 503 KB
english, 2014
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