Evaluation of Template Release Energy with Use of Fluorinated Segregation Agents for UV Nanoimprint Resists
Nakamura, Naoto, Yamashita, Tsuneo, Kitagawa, Takuya, Kawata, Hiroaki, Shirai, Masamitsu, Hirai, YoshihikoVolume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.111
File:
PDF, 503 KB
english, 2014