Cu/Polyimide Multilayer Interconnections Fabricated by...

Journal of Photopolymer Science and Technology 2014 Vol. 27; Iss. 1

Cu/Polyimide Multilayer Interconnections Fabricated by Nanoimprint at Every Lithography Process

Suzuki, Kenta, Youn, Sung-Won, Park, Sang-Cheon, Hiroshima, Hiroshi, Takagi, Hideki
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Volume:
27
Year:
2014
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.27.73
File:
PDF, 628 KB
english, 2014
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