Acid-catalyzed silanol condensation reaction mechanism in a chemical amplification negative resist system.
Shiraishi, Hiroshi, Fukuma, Emiko, Hayashi, Nobuaki, Ueno, Takumi, Tadano, Keiko, Iwayanagi, TakaoVolume:
3
Year:
1990
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.3.385
File:
PDF, 184 KB
english, 1990