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A novel chemical amplification type positive resist using diphenyliodonium 9,10-dimethoxyanthracene-2-sulphonate as photoinitiator.
NAITOH, KAZUHIKO, KANAI, KIMIO, YAMAOKA, TSUGUO, UMEHARA, AKIRAVolume:
4
Year:
1991
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.4.411
File:
PDF, 197 KB
english, 1991