The Synthesis, Characterization and Lithography of Photo-Acid Generators with Improved Thermal Stability.
Houlihan, F. M., Chin, E., Nalamasu, O., Kometani, J. M., Neenan, T.X., Pangborn, A.Volume:
6
Year:
1993
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.6.515
File:
PDF, 443 KB
english, 1993