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New contrast enhancement method and its application to positive type electro-deposition resist.
Yoshida, Yasuhiro, Kubota, Shigeru, Ishibashi, Kenichiro, Ohnishi, Shinsuke, Kusumoto, NobuoVolume:
7
Year:
1994
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.7.45
File:
PDF, 565 KB
english, 1994