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Effect of overcoats on environmental stability of a chemically amplified positive resist against water and organic bases.
Nakamura, Jiro, Ban, Hiroshi, Kawai, Y., Tanaka, AkinobuVolume:
8
Year:
1995
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.8.555
File:
PDF, 264 KB
english, 1995