[IEEE 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Singapore (2016.7.18-2016.7.21)] 2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Failure analysis on MEMS resonator device in wafer fabrication
Ng, H. P., Xu, N. Y., Teo, Angela, Ang, G. B., Quah, A. C. T., Dayanand,, Chen, C. Q., Mai, Z. H., Lam, J.Year:
2016
DOI:
10.1109/ipfa.2016.7564329
File:
PDF, 374 KB
2016