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Journal of Microelectromechanical Systems 2016

The Design and Analysis of Piezoresistive Shuriken-Structured Diaphragm Micro-Pressure Sensors

Guan, Taotao, Yang, Fang, Wang, Wei, Huang, Xian, Jiang, Boyan, Zhang, Dacheng
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Year:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2016.2628781
File:
PDF, 4.33 MB
english, 2016
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