Investigation of the Low Resistivity Cu Wire Formation in...

Investigation of the Low Resistivity Cu Wire Formation in the 8 Inch Wafer Using Ultra-High Purity Plating Materials

Tashiro, Suguru, Kadota, Hiroyuki, Ito, Masahiko, Uchikoshi, Masahito, Mimura, Kouji, Issiki, Minoru, Onuki, Jin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
75
Year:
2011
Journal:
Journal of the Japan Institute of Metals
DOI:
10.2320/jinstmet.75.386
File:
PDF, 2.93 MB
2011
Conversion to is in progress
Conversion to is failed