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Effect of Substrate Treatment for Fracture Behavior of TiN Film during Three-Point Bending Test
Ushiro, Yusuke, Okai, Daisuke, Yamamoto, Atsushi, Fukushima, Yutaka, Taniguchi, Yoshikazu, Matsunaga, KiyoshiVolume:
78
Year:
2014
Language:
english
Journal:
Journal of the Japan Institute of Metals and Materials
DOI:
10.2320/jinstmet.j2014008
File:
PDF, 5.61 MB
english, 2014