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Development of Analysis System for Minute Lattice Strain in Silicon Using Digital X-Ray Diffraction Topography.
Kawado, Seiji, Kojima, Shigeru, Kudo, Yoshihiro, Liu, Kuang-YuVolume:
34
Year:
1995
Journal:
Materia Japan
DOI:
10.2320/materia.34.501
File:
PDF, 1.78 MB
1995