Computer Simulation Method of Thin Film Formation Process.

Computer Simulation Method of Thin Film Formation Process.

Iwanami, Mizuki, Kyuno, Kentaro, Yamamoto, Ryoichi
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Volume:
35
Year:
1996
Journal:
Materia Japan
DOI:
10.2320/materia.35.386
File:
PDF, 2.36 MB
1996
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