Strain Relaxation and Induced Defects in SiGe Thin Films...

MATERIALS TRANSACTIONS 2004 Vol. 45; Iss. 8

Strain Relaxation and Induced Defects in SiGe Thin Films Grown on Ion-Implanted Si Substrates

Yamanaka, Junji, Sawano, Kentaro, Nakagawa, Kiyokazu, Suzuki, Kumiko, Ozawa, Yusuke, Koh, Shinji, Hattori, Takeo, Shiraki, Yasuhiro
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Volume:
45
Year:
2004
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.45.2644
File:
PDF, 159 KB
english, 2004
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