Impact of High Heating Rate, Low Temperature, and Short Time Annealing on the Realization of Low Resistivity Cu Wire
Onuki, Jin, Tamahashi, Kunihiro, Namekawa, Takashi, Sasajima, YasushiVolume:
51
Year:
2010
Language:
english
Journal:
MATERIALS TRANSACTIONS
DOI:
10.2320/matertrans.m2010133
File:
PDF, 609 KB
english, 2010