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APPLICATION OF PHOTOSENSITIVE SILICONE-CONTAINING GRAFT POLYMERS SYNTHESIZED FROM MACROMONOMER TO MICRO LITHOGRAPHY
TACHIBANA, Yoshio, YASUDA, Yasutaro, KOSEKI, Ken-ichi, YAMAOKA, TsuguoVolume:
1
Year:
1988
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.1.220
File:
PDF, 74 KB
english, 1988