Patterning of 100 nm Features Using X-ray Lithography.
Krasnoperova, Azalia A., Hector, Scott, Pomerene, Andrew, Lamberti, Angela, Wind, Shalom, Viswanathan, Raman, Ito, HiroshiVolume:
10
Year:
1997
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.10.613
File:
PDF, 363 KB
english, 1997