Negative EB Resist Materials Using Anisotropic Acid-Diffusion Based on Acid-Catalyzed Dehydration of Phenylcarbinols.
Uchino, Shou-ichi, Yamamoto, Jiro, Migitaka, Sonoko, Kojima, Kyoko, Hashimoto, Michiaki, Murai, Fumio, Shiraishi, HiroshiVolume:
11
Year:
1998
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.11.555
File:
PDF, 640 KB
english, 1998