Mechanism of Acid-Catalyzed Crosslinking Reaction with...

Journal of Photopolymer Science and Technology 1999 Vol. 12; Iss. 2

Mechanism of Acid-Catalyzed Crosslinking Reaction with Hydroxyethyl Group and Application to Microlithography.

Aoai, Toshiaki, Lee, Jong Soo, Watanabe, Hirohmi, Kondo, Syun'ichi, Miyagawa, Nobukazu, Takahara, Shigeru, Yamaoka, Tsuguo
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Volume:
12
Year:
1999
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.12.303
File:
PDF, 203 KB
english, 1999
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