A New Aqueous Developable Positive Tone Photodefinable Polyimide for a Stress Buffer Coat of Semiconductor; HD-8000.
Nunomura, Masataka, Ohe, MasayukiVolume:
14
Year:
2001
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.14.717
File:
PDF, 998 KB
english, 2001