Positive-Working DUV Resist Based on Terpene Derivatives as...

Journal of Photopolymer Science and Technology 2002 Vol. 15; Iss. 1

Positive-Working DUV Resist Based on Terpene Derivatives as Cross-linker.

Park, Chul Ho, Lee, Jong Soo, Miyagawa, Nobukazu, Takahara, Shigeru, Yamaoka, Tsuguo, Kanesige, Katsuhiko, Saeki, Katsuaki, Morikawa, Toshiyuki
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Volume:
15
Year:
2002
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.15.141
File:
PDF, 647 KB
english, 2002
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