Chemically Amplified Main Chain Scission: New Concept to Reduce Line Edge Roughness and Outgassing.
Eschbaumer, Christian, Heusinger, Nicole, Hohle, Christoph, Sebald, MichaelVolume:
15
Year:
2002
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.15.673
File:
PDF, 620 KB
english, 2002