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Plasma Parameters in Platinum Film Formation on the Various Materials by Plasma
Katoh, Masaaki, Igarashi, Yusuke, Kojima, Akira, Ohte, TakeoVolume:
16
Year:
2003
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.16.37
File:
PDF, 163 KB
2003