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Q-Mass Study on Cooperation Process of PCVD and Spattering for 1nm Thickness Semi-conductive C-Au-S Film
Morita, Shinzo, Kashem, Md. AbulVolume:
17
Year:
2004
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.17.159
File:
PDF, 296 KB
2004