Design and Study of Silicone-based Materials for Bilayer...

Journal of Photopolymer Science and Technology 2004 Vol. 17; Iss. 4

Design and Study of Silicone-based Materials for Bilayer Resist Application

Yamada, Shintaro, Cho, Sungseo, Lee, Jay Hyoung, Zhang, Tao, Zampini, Anthony
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Volume:
17
Year:
2004
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.17.511
File:
PDF, 647 KB
2004
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