A Si Device Making Method by Using PAG Contained TARC to...

Journal of Photopolymer Science and Technology 2005 Vol. 18; Iss. 3

A Si Device Making Method by Using PAG Contained TARC to Enhance DOF of Lithography Process.

Shih, Jen-Chieh, Cheng, Jiang-Hong, Owe-Yang, Dah-Chung, Chang, Ching-Yu
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Volume:
18
Year:
2005
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.18.415
File:
PDF, 280 KB
2005
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