The Impact of Fluoropolymers on Line Edge Roughness in 193nm Imaging
Zumsteg, F. C., Leffew, K. W., Feiring, A. E., Crawsfored, M. K., Fahnham, W. B., Petrov, V. A., Schadt III, 1, Tran, H. V.Volume:
18
Year:
2005
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.18.467
File:
PDF, 268 KB
2005