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Au Nano-Wiring on Si Wafer with NaAuCl4-Ethanol Solution
Suzuki, Mikinori, Morita, ShinzoVolume:
19
Year:
2006
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.19.455
File:
PDF, 1.34 MB
2006