Properties of Amorphous Carbon Films Synthesized by...

Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

Kodama, Hideyuki, Iizumi, Satoshi, Nakaya, Masayuki, Shirakura, Akira, Morita, Atsushi, Suzuki, Tetsuya
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Volume:
19
Year:
2006
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.19.673
File:
PDF, 1.75 MB
2006
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