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Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method
Kodama, Hideyuki, Iizumi, Satoshi, Nakaya, Masayuki, Shirakura, Akira, Morita, Atsushi, Suzuki, TetsuyaVolume:
19
Year:
2006
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.19.673
File:
PDF, 1.75 MB
2006