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Synthesis of new alternating copolymers of N-vinylcarbazole and their application as resist materials.
Zeng, Weiping, Yoneda, Yasuhiro, Shirota, Yasuhiko, Endo, Masataka, Tani, YoshiyukiVolume:
2
Year:
1989
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.2.57
File:
PDF, 85 KB
english, 1989