Room-Temperature Nanoimprinting Using Ladder Hydrogen...

Journal of Photopolymer Science and Technology 2007 Vol. 20; Iss. 4

Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane (HSQ)

Nakamatsu, Ken-ichiro, Ishikawa, Kiyoshi, Taneichi, Noriaki, Matsui, Shinji
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Volume:
20
Year:
2007
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.20.555
File:
PDF, 341 KB
english, 2007
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