Micro Patterning Using UV-Nanoimprint Process

Journal of Photopolymer Science and Technology 2007 Vol. 20; Iss. 4

Micro Patterning Using UV-Nanoimprint Process

Goto, Hiroshi, Hagiwara, Akihiko, Ishibashi, Kentaro, Kokubo, Mitsunori, Okuyama, Hiroshi, Fukuyama, Satoshi
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Volume:
20
Year:
2007
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.20.559
File:
PDF, 1.93 MB
english, 2007
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