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Nanoimprinting Using Highly Ordered Anodic Porous Alumina with Reduced Hole Periods
Yanagishita, Takashi, Kumagai, Naoko, Nishio, Kazuyuki, Masuda, HidekiVolume:
20
Year:
2007
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.20.569
File:
PDF, 328 KB
english, 2007