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Degradation of Hydrocarbon Fluids in the Immersion Lithography at 193nm
O'Connor, Naphtali A., Liberman, Vladimir, Lei, Xuegong, López-Gejo, Juan, Turro, Nicholas J., Zimmerman, Paul A.Volume:
21
Year:
2008
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.21.607
File:
PDF, 435 KB
english, 2008