Room-Temperature Nanoimprint using Sol-Gel ITO Film

Journal of Photopolymer Science and Technology 2009 Vol. 22; Iss. 2

Room-Temperature Nanoimprint using Sol-Gel ITO Film

Kang, Yuji, Okada, Makoto, Nakamatsu, Ken-ichiro, Haruyama, Yuichi, Kanda, Kazuhiro, Matsui, Shinji
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Volume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.189
File:
PDF, 568 KB
english, 2009
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