Room-Temperature Nanoimprint using Liquid-Phase Hydrogen...

Journal of Photopolymer Science and Technology 2009 Vol. 22; Iss. 2

Room-Temperature Nanoimprint using Liquid-Phase Hydrogen Silsesquioxane with PDMS mold

Kang, Yuji, Okada, Makoto, Nakamatsu, Ken-ichiro, Haruyama, Yuichi, Kanda, Kazuhiro, Matsui, Shinji
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Volume:
22
Year:
2009
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.193
File:
PDF, 472 KB
2009
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