Freezing Materials For Double Patterning

Journal of Photopolymer Science and Technology 2009 Vol. 22; Iss. 5

Freezing Materials For Double Patterning

Lee, Dong-Kwan, Cao, Yi, Abdallah, David, Yin, Jian, Thiyagarajan, Muthiah, Dammel, Ralph
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Volume:
22
Year:
2009
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.22.653
File:
PDF, 1.00 MB
english, 2009
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