Surface Relief and Porous Structure Patterning of Polyimide

Surface Relief and Porous Structure Patterning of Polyimide

Kodera, Fumiaki, Matsuzawa, Yasushi, Okano, Kunihiko, Yamashita, Takashi
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Volume:
23
Year:
2010
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.23.235
File:
PDF, 698 KB
english, 2010
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