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Development of a Chemically Amplified Photosensitive Polyimide Based on Poly(amic acid), a Dissolution Inhibitor, and a Photoacid Generator
Sugiyama, Masy, Ogura, Tomohito, Higashihara, Tomoya, Ueda, MitsuruVolume:
23
Year:
2010
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.23.483
File:
PDF, 617 KB
english, 2010