Characterizing Polymer bound PAG Type EUV Resist

Journal of Photopolymer Science and Technology 2011 Vol. 24; Iss. 2

Characterizing Polymer bound PAG Type EUV Resist

Tarutani, Shinji, Tamaoki, Hiroshi, Tsubaki, Hideaki, Takahashi, Toshiya, Takizawa, Hiroo, Takahashi, Hidenori, Kang, Su-Jin
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Volume:
24
Year:
2011
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.24.185
File:
PDF, 609 KB
english, 2011
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