Depth Dependence of Time Delay Effect on Hydrogen...

Depth Dependence of Time Delay Effect on Hydrogen Silsesquioxane (HSQ) Resist Layers

Dinh, Cong Que, Oshima, Akihiro, Tagawa, Seiichi
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Volume:
25
Year:
2012
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.25.121
File:
PDF, 328 KB
english, 2012
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