Improvement of the Durability of Crosslinked PTFE Molds for UV- /EB-Nanoimprint Lithography
Takahashi, Tomohiro, Kobayashi, Akinobu, Okubo, Satoshi, Oyama, Tomoko Gowa, Miura, Takaharu, Oshima, Akihiro, Tagawa, Seiichi, Washio, MasakazuVolume:
25
Year:
2012
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.25.249
File:
PDF, 358 KB
english, 2012