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Development of Film Mold for Roll to Roll Nanoimprintg Process and its Application
Sato, Yasuo, Mizawa, Takahide, Mizukami, Yutaka, Takahashi, TakanoriVolume:
26
Year:
2013
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.26.125
File:
PDF, 547 KB
english, 2013