Synthesis of Novel Organometal-Containing Polymers and Their Properties as Electron-Beam Resist Materials.
KATO, NORIKIYO, SURUGA, TOSHIHIDE, TAKEDA, KAZUHIRO, NAGASAKI, YUKIO, KATO, MASAOVolume:
5
Year:
1992
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.5.585
File:
PDF, 163 KB
english, 1992