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The effects of polymer undercoats on the pattern profile of chemically amplified resists.
NAITO, TAKUYA, SASAKI, OSAMU, TADA, TSUKASA, KIHARA, NAOKO, USHIROGOUCHI, TOHRU, SAITO, SATOSHIVolume:
6
Year:
1993
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.6.315
File:
PDF, 122 KB
english, 1993