Annealing concept for the design of environmentally stable chemical amplification resists.
ITO, Hiroshi, BREYTA, Greg, SOORIYAKUMARAN, R., HOFER, DonVolume:
8
Year:
1995
Language:
english
Journal:
Journal of Photopolymer Science and Technology
DOI:
10.2494/photopolymer.8.505
File:
PDF, 673 KB
english, 1995